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Acta Optica Sinica, Volume. 34, Issue 5, 531002(2014)

Optical Constants and Properties of Dual-Ion-Beam Sputtering Ta2O5/SiO2 Thin Film by Spectroscopy

Shang Peng1,2、*, Xiong Shengming1, Li Linghui1, and Tian Dong1
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    Shang Peng, Xiong Shengming, Li Linghui, Tian Dong. Optical Constants and Properties of Dual-Ion-Beam Sputtering Ta2O5/SiO2 Thin Film by Spectroscopy[J]. Acta Optica Sinica, 2014, 34(5): 531002

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    Paper Information

    Category: Thin Films

    Received: Dec. 9, 2013

    Accepted: --

    Published Online: Apr. 22, 2014

    The Author Email: Peng Shang (shangpeng@163.com)

    DOI:10.3788/aos201434.0531002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology