Journal of Infrared and Millimeter Waves, Volume. 41, Issue 2, 389(2022)

High performance Ge:B blocked impurity band detector developed using near-surface processing techniques

Chang-Yi PAN1,2, Hao MOU1, Xiao-Mei YAO1,2, Tao HU1,2, Yu WANG1, Chao WANG1,2, Hui-Yong DENG1,2、*, and Ning DAI1,2,3、**
Author Affiliations
  • 1State Key Laboratory of Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China
  • 2University of Chinese Academy of Sciences,Beijing 100049,China
  • 3Hangzhou Institute for Advanced Study,University of Chinese Academy of Sciences,Hangzhou 310024,China
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    Figures & Tables(8)
    Fabrication process of Ge:B BIB detector
    Doping profile of B in the absorbing region by five-steps-implantation
    Three-dimensional(3-D)schematic structure of Ge:B BIB detector
    Dark current of Ge:B BIB detector at different temperatures
    Responsivity in response to a 1000 K blackbody at 3.5 K
    Relative spectral response at 3.5 K
    Two excitation models in Ge:B BIB detector
    Normalized spectral response at different voltages at 3.5 K,and the inset is the ratio of the relative response intensity at 40 mV and 10 mV
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    Chang-Yi PAN, Hao MOU, Xiao-Mei YAO, Tao HU, Yu WANG, Chao WANG, Hui-Yong DENG, Ning DAI. High performance Ge:B blocked impurity band detector developed using near-surface processing techniques[J]. Journal of Infrared and Millimeter Waves, 2022, 41(2): 389

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    Paper Information

    Category: Research Articles

    Received: Apr. 13, 2021

    Accepted: --

    Published Online: Jul. 8, 2022

    The Author Email: Hui-Yong DENG (hydeng@mail.sitp.ac.cn), Ning DAI (ndai@mail.sitp.ac.cn)

    DOI:10.11972/j.issn.1001-9014.2022.02.003

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