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Chinese Optics Letters, Volume. 16, Issue 8, 081203(2018)

Model-based adaptive non-null interferometry for freeform surface metrology

Lei Zhang1、*, Sheng Zhou1, Dong Li2, Jingsong Li1, and Benli Yu1
Author Affiliations
  • 1Key Laboratory of Opto-Electronic Information Acquisition and Manipulation, Ministry of Education, Anhui University, Hefei 230601, China
  • 2Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China
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    Cited By

    [1] Lei Zhang, Chen Li, Xiaolin Huang, Yukun Zhang, Sheng Zhou, Jingsong Li, Benli Yu. Compact adaptive interferometer for unknown freeform surfaces with large departure. Optics Express, 28, 1897(2020).

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    Lei Zhang, Sheng Zhou, Dong Li, Jingsong Li, Benli Yu, "Model-based adaptive non-null interferometry for freeform surface metrology," Chin. Opt. Lett. 16, 081203 (2018)

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    Paper Information

    Category: Instrumentation, measurement, and metrology

    Received: Mar. 1, 2018

    Accepted: Jun. 25, 2018

    Published Online: Aug. 2, 2018

    The Author Email: Lei Zhang (optzl@ahu.edu.cn)

    DOI:10.3788/COL201816.081203

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology