Chinese Optics Letters, Volume. 16, Issue 8, 081203(2018)
Model-based adaptive non-null interferometry for freeform surface metrology
Fig. 3. Aberration compensation of the tested surface. (a) The optimal interferogram by transmission sphere, (b) the interferogram compensated by PNL in the experiment, and (c) the interferogram compensated by DM in the experiment.
Fig. 4. (a) The three DM surface figures and (b) the corresponding interferograms after DM compensation in the experiment.
Fig. 5. Result of MCRT algorithm. (a) The initial interferograms after DM compensation in the system model, (b) the interferograms after the MCRT algorithm in the system model, and (c) the map of surface figure error.
Fig. 6. Test results of the paraboloidal surface, where (a) is the initial interferogram in the experiment, (b) is the interferogram after DM compensation in the experiment, (c) is the interferogram in the model after compensation and the MCRT algorithm, (d) is the surface figure error map in actual MANI flip-angle imaging (AFI), (e) is the figure map from the Zygo interferometer, and (f) is the error map between (d) and (e).
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Lei Zhang, Sheng Zhou, Dong Li, Jingsong Li, Benli Yu, "Model-based adaptive non-null interferometry for freeform surface metrology," Chin. Opt. Lett. 16, 081203 (2018)
Category: Instrumentation, measurement, and metrology
Received: Mar. 1, 2018
Accepted: Jun. 25, 2018
Published Online: Aug. 2, 2018
The Author Email: Lei Zhang (optzl@ahu.edu.cn)