Chinese Optics Letters, Volume. 16, Issue 8, 081203(2018)

Model-based adaptive non-null interferometry for freeform surface metrology

Lei Zhang1、*, Sheng Zhou1, Dong Li2, Jingsong Li1, and Benli Yu1
Author Affiliations
  • 1Key Laboratory of Opto-Electronic Information Acquisition and Manipulation, Ministry of Education, Anhui University, Hefei 230601, China
  • 2Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China
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    Figures & Tables(6)
    System layout and principle of the flexible MANI.
    Experiment layout.
    Aberration compensation of the tested surface. (a) The optimal interferogram by transmission sphere, (b) the interferogram compensated by PNL in the experiment, and (c) the interferogram compensated by DM in the experiment.
    (a) The three DM surface figures and (b) the corresponding interferograms after DM compensation in the experiment.
    Result of MCRT algorithm. (a) The initial interferograms after DM compensation in the system model, (b) the interferograms after the MCRT algorithm in the system model, and (c) the map of surface figure error.
    Test results of the paraboloidal surface, where (a) is the initial interferogram in the experiment, (b) is the interferogram after DM compensation in the experiment, (c) is the interferogram in the model after compensation and the MCRT algorithm, (d) is the surface figure error map in actual MANI flip-angle imaging (AFI), (e) is the figure map from the Zygo interferometer, and (f) is the error map between (d) and (e).
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    Lei Zhang, Sheng Zhou, Dong Li, Jingsong Li, Benli Yu, "Model-based adaptive non-null interferometry for freeform surface metrology," Chin. Opt. Lett. 16, 081203 (2018)

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    Paper Information

    Category: Instrumentation, measurement, and metrology

    Received: Mar. 1, 2018

    Accepted: Jun. 25, 2018

    Published Online: Aug. 2, 2018

    The Author Email: Lei Zhang (optzl@ahu.edu.cn)

    DOI:10.3788/COL201816.081203

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