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Optics and Precision Engineering, Volume. 20, Issue 9, 1904(2012)

Simulation and experiments of ion beam etching process for blazed holographic grating

WU Na1,2、*, TAN Xin1, Bayanheshig1, and TANG Yu-guo1
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  • 2[in Chinese]
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    WU Na, TAN Xin, Bayanheshig, TANG Yu-guo. Simulation and experiments of ion beam etching process for blazed holographic grating[J]. Optics and Precision Engineering, 2012, 20(9): 1904

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    Received: Apr. 23, 2012

    Accepted: --

    Published Online: Oct. 12, 2012

    The Author Email: WU Na (chinagrating.wuna@gmail.com)

    DOI:10.3788/ope.20122009.1904

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology