Microelectronics, Volume. 54, Issue 1, 145(2024)

A Mg-Doped NiO Thin Film Fabricated by Magnetron Sputtering Method Using Double Targets

WANG Xin, CONG Fanchao, and LUO Minghai
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  • [in Chinese]
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    References(8)

    [2] [2] LI X X, LI Y C, LI Y J, et al. Influence of buffer layer on optoelectronic properties of B-Mg co-doped ZnO ultrathin film for high-performance transparent conductor application [J]. Journal of Molecular Structure, 2023, 1294: 136494-1-8.

    [3] [3] ALVES M, BRITO D, CARNEIRO J, et al. In2O3:H transparent conductive oxide films for application in Cu(In,Ga)Se2solar cells [J]. Thin Solid Films, 2023, 774: 139840-1-4.

    [4] [4] ZHANG C, LIU K W, AI Q, et al. High-performance fully transparent Ga2O3 solar-blind UV photodetector with the embedded indium-tin-oxide electrodes [J]. Materials Today Physics, 2023, 33: 101034-1-6.

    [7] [7] Roessler D M, Walker W C. Electronic spectrum and ultraviolet optical properties of crystalline MgO [J]. Physical Review, 1967, 159(3): 733-738.

    [8] [8] MUJDAT C, KIVANC S, SEDA A, et al. Improving the electrical performance of NiO based photodiode fabricated by sol-gel process with Al doping [J]. Sensors & Actuators: A. Physical, 2023, 350: 114099-1-9.

    [9] [9] IQBAL M S B, BERRY J, GHOSH K. Study of pure Ni, NiO, and mixture of Ni-NiO thin films on piezoelectric lithium niobate substrate by pulsed laser deposition [J]. Thin Solid Films, 2023, 781: 140002-1-8.

    [10] [10] LI G M, ZHANG J W, HOU X. High-responsivity UV detectors based on MgNiO films grown by magnetron sputtering [J]. Europhysics Letters, 2014, 106(3): 38002-1-5.

    [11] [11] NISHITANI H, OHTA K, KITANO S, et al. Band gap tuning of Ni1-xMgxO films by radio-frequency sputter deposition for deep-ultraviolet photodetectors [J]. Applied Physics Express, 2015, 8(10): 105801-1-3.

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    WANG Xin, CONG Fanchao, LUO Minghai. A Mg-Doped NiO Thin Film Fabricated by Magnetron Sputtering Method Using Double Targets[J]. Microelectronics, 2024, 54(1): 145

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    Paper Information

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    Received: Sep. 8, 2023

    Accepted: --

    Published Online: Aug. 7, 2024

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.230349

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