Microelectronics, Volume. 54, Issue 1, 145(2024)
A Mg-Doped NiO Thin Film Fabricated by Magnetron Sputtering Method Using Double Targets
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WANG Xin, CONG Fanchao, LUO Minghai. A Mg-Doped NiO Thin Film Fabricated by Magnetron Sputtering Method Using Double Targets[J]. Microelectronics, 2024, 54(1): 145
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Received: Sep. 8, 2023
Accepted: --
Published Online: Aug. 7, 2024
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