High Power Laser and Particle Beams, Volume. 35, Issue 11, 111005(2023)

Improving laser damage resistance of fused silica by organic fluoric acid etching

Fangting Chi, Xiaoyu Li, Yuanli Li, Lina Lü, Hao Peng, and Zhiyuan Du
Author Affiliations
  • Innovation Center for Nuclear Environmental Safety, Southwest University of Science and Technology, Mianyang 621010, China
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    References(47)

    [11] [11] Zhao Linjie , Cheng Jian, Chen Mingjun, et al. Fmation mechanism of a smooth, defectfree surface of fused silica optics using rapid CO2 laser polishing[J]. International Journal of Extreme Manufacturing, 2019, 1: 035001.

    [17] Suratwala T, Wong L, Miller P, et al. Sub-surface mechanical damage distributions during grinding of fused silica[J]. Journal of Non-Crystalline Solids, 352, 5601-5617(2006).

    [20] Li Yaguo, Yuan Zhigang, Wang Jian, et al. Laser-induced damage characteristics in fused silica surface due to mechanical and chemical defects during manufacturing processes[J]. Optics & Laser Technology, 91, 149-158(2017).

    [32] Zheng Zhi, Zu Xiaotao, Jiang Xiaodong, et al. Effect of HF etching on the surface quality and laser-induced damage of fused silica[J]. Optics & Laser Technology, 44, 1039-1042(2012).

    [43] Xiang Zhen, Nie Chuanji, Ge Jianhong, . Eliminating of subsurface damage structure[J]. High Power Laser and Particle Beams, 19, 373-376(2007).

    [44] Li Yuhan, Xiao Huapan, Wang Hairong, . Review on wet etching technique of fused silica optical elements[J]. Laser & Optoelectronics Progress, 58, 1516026(2021).

    [45] Guo Yuanjun, Zu Xiaotao, Jiang Xiaodong, . Comparison of laser-induced damage of monolayer ZrO2 films preparated by PVD and sol-gel methods[J]. High Power Laser and Particle Beams, 19, 1849-1852(2007).

    [46] Miao Xinxiang, Yuan Xiaodong, Wang Haijun, . Experiment of laser induced damage threshold for fused silica initiated at thin film contamination of Cu on surface[J]. High Power Laser and Particle Beams, 20, 1483-1486(2008).

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    Fangting Chi, Xiaoyu Li, Yuanli Li, Lina Lü, Hao Peng, Zhiyuan Du. Improving laser damage resistance of fused silica by organic fluoric acid etching[J]. High Power Laser and Particle Beams, 2023, 35(11): 111005

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    Paper Information

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    Received: May. 14, 2023

    Accepted: Sep. 27, 2023

    Published Online: Dec. 26, 2023

    The Author Email:

    DOI:10.11884/HPLPB202335.230131

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