High Power Laser and Particle Beams, Volume. 35, Issue 11, 111005(2023)
Improving laser damage resistance of fused silica by organic fluoric acid etching
Fig. 1. Schematic diagram of organic fluoric acid statically etched fused silica optics
Fig. 2. Etching rate of organic fluoric acid on fused silica optics
Fig. 5. Optical microscope images of scratches on the fused silica surface
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Fangting Chi, Xiaoyu Li, Yuanli Li, Lina Lü, Hao Peng, Zhiyuan Du. Improving laser damage resistance of fused silica by organic fluoric acid etching[J]. High Power Laser and Particle Beams, 2023, 35(11): 111005
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Received: May. 14, 2023
Accepted: Sep. 27, 2023
Published Online: Dec. 26, 2023
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