[1] [1] PAO S Y, WANG Z,HUANG Z H,CHAO M C,et al..Characteristics of the unique modes in HBARs [C] IEEE Frequ. Symp. Proc,2003:758-793.

[2] [2] DRISCOLL M M,JELEN R A,MATTHEWS N.Extremely low phase noise UHF oscillators utilizing high-overtune,Bulk acoustic resonators[C].IEEE Ultrasonics Symposium,1990:513-518.

[3] [3] LAKIN K M.KLINE G R, MCCARRON K T. High-Q microwave acoustic resonators and filters [C].IEEE Transactions on Microwaue Theory and Techniques,1993,41(12):2139-2146.

[5] [5] BALLEY D S,DRISCOLL M M, JELEN R A.Frequency stability of high-overtune Bulk acoustic resonatos[C]. Proc. 1990 IEEE Ultrasonics Symposium,1990:509-512.

[6] [6] CHEN Q M.Materials property dependence of the effective electromechanical coupling coefficient of thin film bulk acoustic resonators [C].IEEE International Ultrasonics, Ferroelectrics, and Frequen-cy Control Joint 50th Anniversary Conference,2004:11-17

[7] [7] IEEE Standard on Piezoelectricity 176-1987[S]. Available from IEEE Customer Service, Piscataway,NJ.

[8] [8] KAN J W, TANG K H, WANG SH J,et alModeling and simulation of piezoelectric cantilever generators[J].Opt. Precision Eng.,2008,16(1):1-71.(in chinese)

[9] [9] CUI Y,MENG H B,WANG J,et al.. Microforce sensors based on PT/PZT/PT thin films[J].Opt. Precision Eng.,2007,15(9):1404-1409.(in chi-nese)