Optics and Precision Engineering, Volume. 17, Issue 6, 1251(2009)
Design of thin film bulk acoustic resonator under unique mode
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MO Shao-meng, CHEN Jian-ming, WU Guang-min, ZHAO Jian-jun. Design of thin film bulk acoustic resonator under unique mode[J]. Optics and Precision Engineering, 2009, 17(6): 1251
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