Optics and Precision Engineering, Volume. 33, Issue 11, 1700(2025)

Thermal field electron gun immersed in magnetic lens field

Weixia ZHAO1,2, Lixin ZHANG1、*, Junbiao LIU1,2、*, Bohua YIN1,2, and Li HAN1,2
Author Affiliations
  • 1Research Department of Micro-nano Fabrication Technology and Intelligent Electronic Devices, Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing0090, China
  • 2School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing100049, China
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    Figures & Tables(19)
    Schematic structure and principle of thermal field electron gun immersed in magnetic lens field
    Structures of three magnetic immersion lenses
    Distributions of axial magnetic field of three magnetic immersion lenses under same excitation
    Relationship between l/Cs and excitation intensity of lens Vr/NI2[28]
    Structure of magnetic field immersed thermal field electron gun and electron beam trajectory
    Performance variation of magnetic field immersed thermal field electron gun with lens current
    Variation of reduced brightness of magnetic field immersed thermal field electron gun with lens current
    Schematic diagram of structure of magnetic filed immersed electron optical system and optical path under different working modes
    Experimental platform of magnetic field immersed thermal field electron gun
    Comparison between simulated and measured results of on-axis magnetic field in magnetic immersion lens
    Test results of saturation magnetic field in magnetic immersion lens
    Focusing process of beam spot
    Variation of effective beam current of electron gun with magnetic immersion lens excitation
    Variation of effective beam current of magnetic field immersed electron gun with extractor voltage
    Variation of effective beam current of magnetic field immersed electron gun with accelerator voltage
    • Table 1. Simulation results of electron optical properties of three magnetic immersion lenses

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      Table 1. Simulation results of electron optical properties of three magnetic immersion lenses

      Lens structures

      Lens excitation

      /At

      Field half-width

      /mm

      Bzmax

      /T

      zmax

      /mm

      Cs

      /m

      ds

      /nm

      Bcmax

      /T

      Coil current density

      /(A·cm-2

      Single polepiece3 101.5517.910.13-3.905.411.260.97290.45
      Double polepiece with radial gap2 234.6814.950.13-3.386.121.650.97407.79
      Double polepiece with axial gap2 421.7117.410.13-3.905.481.280.88226.79
    • Table 2. Simulation parameters of magnetic field immersed thermal field electron gun

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      Table 2. Simulation parameters of magnetic field immersed thermal field electron gun

      Simulation parameterValue
      Tip radius /μm1
      Position of tip/mm0
      Suppressor voltage /V-300
      Extractor voltage /V5000
      Accelerator voltage /V30000
      Diameter of gun aperture/μm250
      Position of gun aperture/mm30.45
      Diameter of polepiece /mmUpper 59,lower 10
      Polepiece gap/mm19
    • Table 3. Simulation results on property of magnetic field immersed electron optical system under different working modes

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      Table 3. Simulation results on property of magnetic field immersed electron optical system under different working modes

      Working modesLens excitation/Atαo/mradMdg/nmds/nmdc/nmdi/nmMI
      High resolution00.150.0090.200.770.290.97
      Divergence3 1391.530.0932.610.770.303.057.3
      3 2042.150.1303.640.770.304.0514.2
      3 2934.820.2918.180.780.378.5171.5
      Parallel3 3075.930.35810.060.800.4010.37108.1
      Convergence3 3238.230.49713.960.860.5114.27208.3
      3 33210.300.62217.491.000.6417.83326.8
      3 34013.780.83223.381.490.9223.90584.1
      Crossover3 4384.83-0.2928.200.780.378.5371.8
      3 5282.17-0.1313.690.770.304.0914.5
      3 5961.53-0.0932.600.770.303.057.22
    • Table 4. Simulation parameters and results of magnetic field immersed thermal field electron gun

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      Table 4. Simulation parameters and results of magnetic field immersed thermal field electron gun

      Performance ParametersWithout magnetic fieldMagnetic field immersed
      Tip radius/μm0.50.5
      Suppressor voltage/V-300-300
      Extractor voltage/V5 0005 000
      Accelerator voltage/V30 00030 000
      Lens excitation/At1 520.0
      Reduced brightness/(A·m-2·sr-1·V-13.26×1083.25×108
      Dimeter of crossover/nm22.30192.26
      Position of crossover/mm-2.43158.58
      Spherical aberration/nm5.95871.06
      Chromatic aberration/nm0.9351.98
      Beam half-angle/mrad3.340.91
      Angular intensity/(mA·sr-13.80283.69
      Effective beam current/nA133.11726.52
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    Weixia ZHAO, Lixin ZHANG, Junbiao LIU, Bohua YIN, Li HAN. Thermal field electron gun immersed in magnetic lens field[J]. Optics and Precision Engineering, 2025, 33(11): 1700

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    Paper Information

    Category:

    Received: Feb. 27, 2025

    Accepted: --

    Published Online: Aug. 14, 2025

    The Author Email: Lixin ZHANG (zhanglx@mail.iee.ac.cn), Junbiao LIU (liujb@mail.iee.ac.cn)

    DOI:10.37188/OPE.20253311.1700

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