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INFRARED, Volume. 46, Issue 3, 1(2025)

Control of ICP Etching on Electrodes Fabrication of Superlattice Infrared Detectors

Ang REN, Ming LIU, and Jing-feng LI
Author Affiliations
  • North China Research Institute of Electro-Optics, Beijing 100015, China
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    REN Ang, LIU Ming, LI Jing-feng. Control of ICP Etching on Electrodes Fabrication of Superlattice Infrared Detectors[J]. INFRARED, 2025, 46(3): 1

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    Paper Information

    Received: Aug. 6, 2024

    Accepted: Apr. 11, 2025

    Published Online: Apr. 11, 2025

    The Author Email:

    DOI:10.3969/j.issn.1672-8785.2025.03.001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology