Laser & Optoelectronics Progress, Volume. 57, Issue 23, 233003(2020)

Quantitative Analysis of Cu(In,Ga)Se2 Thin Films Deposited by Magnetron Sputtering Technology Using Laser-Induced Breakdown Spectroscopy

Lili Dong1, Shiming Liu2, and Junshan Xiu2、*
Author Affiliations
  • 1School of Chemistry and Chemical Engineering of Shandong University of Technology, Zibo, Shandong 255049, China
  • 2School of Physics and Optoelectronic Engineering, Shandong University of Technology, Zibo, Shandong 255049, China
  • show less
    References(17)

    [2] Noufi R, Axton R, Herrington C et al. Electronic properties versus composition of thin films of CuInSe2[J]. Applied Physics Letters, 45, 668-670(1984).

    [4] Eisgruber I L, Joshi B, Gomez N et al. In situ X-ray fluorescence used for real-time control of CuInxGa1-xSe2 thin film composition[J]. Thin Solid Films, 408, 64-72(2002).

    [5] Zhang H X, Hong R J. CIGS absorbing layers prepared by RF magnetron sputtering from a single quaternary target[J]. Ceramics International, 42, 14543-14547(2016).

    [6] Bai T R, Liu C Q, Wang N et al. Effects of sputtering voltage and current on the composition and microstructure of the CIGS films prepared by one-step pulsed DC magnetron sputtering[J]. Journal of Alloys and Compounds, 646, 532-540(2015).

    [8] de Giacomo A, Dell'Aglio M, de Pascale O et al. From single pulse to double pulse ns-laser induced breakdown spectroscopy under water: elemental analysis of aqueous solutions and submerged solid samples[J]. Spectrochimica Acta Part B: Atomic Spectroscopy, 62, 721-738(2007).

    [9] Wang Z, Yuan T B, Hou Z Y et al. Laser-induced breakdown spectroscopy in China[J]. Frontiers of Physics, 9, 419-438(2014).

    [11] In J H, Kim C K, Lee S H et al. Rapid quantitative analysis of elemental composition and depth profile of Cu(In, Ga)Se2 thin solar cell film using laser-induced breakdown spectroscopy[J]. Thin Solid Films, 579, 89-94(2015).

    [13] Kim C K, In J H, Lee S H et al. Influence of laser wavelength on the laser induced breakdown spectroscopy measurement of thin CuIn1-xGaxSe2 solar cell films[J]. Spectrochimica Acta Part B: Atomic Spectroscopy, 88, 20-25(2013).

    Tools

    Get Citation

    Copy Citation Text

    Lili Dong, Shiming Liu, Junshan Xiu. Quantitative Analysis of Cu(In,Ga)Se2 Thin Films Deposited by Magnetron Sputtering Technology Using Laser-Induced Breakdown Spectroscopy[J]. Laser & Optoelectronics Progress, 2020, 57(23): 233003

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Spectroscopy

    Received: Apr. 6, 2020

    Accepted: May. 8, 2020

    Published Online: Dec. 10, 2020

    The Author Email: Junshan Xiu (xiujunshan@126.com)

    DOI:10.3788/LOP57.233003

    Topics