Quantitative Analysis of Cu(In,Ga)Se<sub>2</sub> Thin Films Deposited by Magnetron Sputtering Technology Using Laser-Induced Breakdown Spectroscopy

Lili Dong; Shiming Liu; Junshan Xiu

doi:10.3788/LOP57.233003

Laser & Optoelectronics Progress, Volume. 57, Issue 23, 233003(2020)

Quantitative Analysis of Cu(In,Ga)Se₂ Thin Films Deposited by Magnetron Sputtering Technology Using Laser-Induced Breakdown Spectroscopy

Lili Dong¹, Shiming Liu², and Junshan Xiu^2、*

Author Affiliations

¹School of Chemistry and Chemical Engineering of Shandong University of Technology, Zibo, Shandong 255049, China

²School of Physics and Optoelectronic Engineering, Shandong University of Technology, Zibo, Shandong 255049, China

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Lili Dong, Shiming Liu, Junshan Xiu. Quantitative Analysis of Cu(In,Ga)Se₂ Thin Films Deposited by Magnetron Sputtering Technology Using Laser-Induced Breakdown Spectroscopy[J]. Laser & Optoelectronics Progress, 2020, 57(23): 233003

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Paper Information

Category: Spectroscopy

Received: Apr. 6, 2020

Accepted: May. 8, 2020

Published Online: Dec. 10, 2020

The Author Email: Junshan Xiu (xiujunshan@126.com)

DOI:10.3788/LOP57.233003

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology