[2] [2] He J Y, Su H H, Qian N, et al. Machining performance analysis of rotary ultrasonic-assisted drilling of SiCf/SiC composites[J]. Crystals, 2022, 12(11): 1658.

[9] [9] Yue X M, Li Q, Yang X D. Influence of thermal stress on material removal of Cf_SiC composite in EDM[J]. Ceramics International, 2020, 46(6): 7998-8009.

[10] [10] Zhang Y F, Liu D, Zhang W J, et al. Hole characteristics and surface damage formation mechanisms of Cf/SiC composites machined by abrasive waterjet[J]. Ceramics International, 2022, 48(4): 5488-5498.

[11] [11] Qin Y M, Liu C X, Zheng C, et al. The corrosion behavior of CVD SiC coatings on SiCf/SiC composites in a simulated molten salt reactors environment[J]. Corrosion Science, 2022, 204: 110411.

[12] [12] Pan S N, Li Q Y, Xian Z K, et al. The effects of laser parameters and the ablation mechanism in laser ablation of C/SiC composite[J]. Materials, 2019, 12(19): 3076.

[13] [13] Dushkina N M, Wagner F R, Boillat C. Water jet guided laser versus saw dicing[J]. Proceedings of the SPIE, 2003, 4977: 75-85.

[14] [14] Pauchard A, Lee K, Vago N, et al. Advanced micromachining combining nanosecond lasers with water jet-guided laser technology[C]//Conference on laser applications in microelectronic and optoelectronic manufacturing VII. San Jose: SPIE, 2009: 72010A.

[15] [15] Gobet M, Obi S, Pavius M, et al. Implementation of short-pulse lasers for wafer scribing and grooving applications[J]. Journal of Laser Micro/Nanoengineering, 2010, 5(1): 16-20.