Study on the influence law of water-jet guided laser process parameters on SiC materials

ZHANG Qing; QIAO Hong-cao; WANG Shun-shan; LIANG Jin-sheng; ZHANG Yu-ting; ZHAO Ji-bin

doi:10.3969/j.issn.1001-5078.2025.05.008

Laser & Infrared, Volume. 55, Issue 5, 694(2025)

Study on the influence law of water-jet guided laser process parameters on SiC materials

ZHANG Qing^1,2, QIAO Hong-cao^1、*, WANG Shun-shan^1,2, LIANG Jin-sheng^1,2, ZHANG Yu-ting^1,2, and ZHAO Ji-bin¹

Author Affiliations

¹Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China

²University of Chinese Academy of Sciences, Beijing 100049, China

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ZHANG Qing, QIAO Hong-cao, WANG Shun-shan, LIANG Jin-sheng, ZHANG Yu-ting, ZHAO Ji-bin. Study on the influence law of water-jet guided laser process parameters on SiC materials[J]. Laser & Infrared, 2025, 55(5): 694

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Paper Information

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Received: Sep. 6, 2024

Accepted: Jul. 11, 2025

Published Online: Jul. 11, 2025

The Author Email: QIAO Hong-cao (hcqiao@sia.cn)

DOI:10.3969/j.issn.1001-5078.2025.05.008

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology