Infrared and Laser Engineering, Volume. 54, Issue 8, 20250135(2025)

Research on the performance of PIN-type InGaAs detectors based on plasma hydrogenation

Binyao FENG1,2, Hui QIAO2, Yizhen YU2, Liyi YANG2, Xiangrong HE2, Runze XIA2, and Xue LI1,2
Author Affiliations
  • 1School of Microelectronics, Shanghai University, Shanghai 200444, China
  • 2Key Laboratory of Infrared Detection, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
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    References(24)

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    Binyao FENG, Hui QIAO, Yizhen YU, Liyi YANG, Xiangrong HE, Runze XIA, Xue LI. Research on the performance of PIN-type InGaAs detectors based on plasma hydrogenation[J]. Infrared and Laser Engineering, 2025, 54(8): 20250135

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    Paper Information

    Category: Infrared

    Received: Feb. 28, 2025

    Accepted: --

    Published Online: Aug. 29, 2025

    The Author Email:

    DOI:10.3788/IRLA20250135

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