[1] [1] ZHU Z,TO S,ZHU W L,et al.Optimum design of a piezo-actuated triaxial compliant mechanism for nanocutting［J］.IEEE Transactions on Industrial Electronics,2018,65(8):6362-6371.

[2] [2] LAI T,PENG X,TIE G,et al.High accurate squareness measurement squareness method for ultra-precision machine based on error separation［J］.Precision Engineering,2017,49:15-23.

[3] [3] AI Y,JIANG P,SHAO X,et al.A defect-responsive optimization method for the fiber laser butt welding of dissimilar materials［J］.Materials & Design,2016,90:669-681.

[4] [4] LIU Y T,LI B J.A 3-axis precision positioning device using PZT actuators with low interference motions［J］.Precision Engineering,2016,46:118-128.

[5] [5] YANG S,CHEN W,LIU J,et al.Design,analysis and testing of a novel decoupled 2-DOF flexure-based micropositioning stage［J］.Journal of Micromechanics and Microengineering,2017,27(9):095010.

[6] [6] ZHU W L,ZHU Z,GUO P,et al.A novel hybrid actuation mechanism based XY nanopositioning stage with totally decoupled kinematics［J］.Mechanical Systems and Signal Processing,2018,99:747-759.

[8] [8] CHOI K B,LEE J,KIM G,et al.Design and analysis of a flexure-based parallel XY stage driven by differential piezo forces［J］.International Journal of Precision Engineering and Manufacturing,2020,21(8):1547-1561.

[9] [9] TIAN Y,MA Y,WANG F,et al.A novel XYZ micro/nano positioner with an amplifier based on L-shape levers and half-bridge structure［J］.Sensors and Actuators A:Physical,2020,302:111777.