Piezoelectrics & Acoustooptics, Volume. 45, Issue 5, 705(2023)
Design of a x-y-θz Large Stroke Uncoupled Parallel Piezoelectric Micro-Positioning Stage
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CHEN Pan, ZHU Chunli, CUI Yuguo, HU Zhiyi, YANG Yiling, LOU Junqiang. Design of a x-y-θz Large Stroke Uncoupled Parallel Piezoelectric Micro-Positioning Stage[J]. Piezoelectrics & Acoustooptics, 2023, 45(5): 705
Paper Information
Received: Feb. 22, 2023
Accepted: --
Published Online: Jan. 6, 2024
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