Piezoelectrics & Acoustooptics, Volume. 45, Issue 5, 705(2023)

Design of a x-y-θz Large Stroke Uncoupled Parallel Piezoelectric Micro-Positioning Stage

CHEN Pan, ZHU Chunli, CUI Yuguo, HU Zhiyi, YANG Yiling, and LOU Junqiang
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    In order to realize precise positioning of large displacement stroke and no coupling motion, a x-y-θz 3-DOF parallel piezoelectric micro-positioning stage with compact structure and large worktable is designed. Firstly, in this paper, the driving unit of the stage is designed by using the compliant bridge amplification mechanism of double flexible plates, and the body of the stage is designed based on the compliant mechanism of double parallel four-link, thereby obtaining the overall structure of the stage. Secondly, the finite element method is used to analyze the stress, displacement amplification and mode of the stage. Finally, an experimental system for the designed micro-positioning stage is built, and the displacement and frequency response characteristics of the stage are tested. The experimental results show that the maximum output displacement of the stage in the x direction is 306.1 μm and the coupling rate is 0.26%, the maximum output displacement of the stage in the y direction is 402.3 μm and the coupling rate is 0.14%, and the maximum rotation angle in the θz direction (i.e. around the z axis) is 2.72 mrad. The displacement resolutions of the stage in x, y and θz directions are 10 nm, 10 nm and 0.1 μrad, respectively, and the natural frequencies are 104.1 Hz, 130.0 Hz and 115.6 Hz, respectively.

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    CHEN Pan, ZHU Chunli, CUI Yuguo, HU Zhiyi, YANG Yiling, LOU Junqiang. Design of a x-y-θz Large Stroke Uncoupled Parallel Piezoelectric Micro-Positioning Stage[J]. Piezoelectrics & Acoustooptics, 2023, 45(5): 705

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    Paper Information

    Received: Feb. 22, 2023

    Accepted: --

    Published Online: Jan. 6, 2024

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2023.05.010

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