Laser & Optoelectronics Progress, Volume. 62, Issue 5, 0512002(2025)

High-Precision Flexible Hinge Rotation Stage for Stitching Interference System of Mirror

Huiyun Wang*, Shuaikang Jiang, Shen Wei, Xuewei Du, and Qiuping Wang
Author Affiliations
  • National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230026, Anhui , China
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    References(23)

    [2] Li M, Wu J L, Wu Y Q et al. A review on the fabrication technology of X-ray reflector[J]. Opto-Electronic Engineering, 47, 200205(2020).

    [13] Qin D. High precision surface detection of synchrotron radiation X-ray mirror[D](2022).

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    Huiyun Wang, Shuaikang Jiang, Shen Wei, Xuewei Du, Qiuping Wang. High-Precision Flexible Hinge Rotation Stage for Stitching Interference System of Mirror[J]. Laser & Optoelectronics Progress, 2025, 62(5): 0512002

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: May. 11, 2024

    Accepted: Jul. 12, 2024

    Published Online: Mar. 7, 2025

    The Author Email:

    DOI:10.3788/LOP241261

    CSTR:32186.14.LOP241261

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