Laser & Optoelectronics Progress, Volume. 62, Issue 5, 0512002(2025)

High-Precision Flexible Hinge Rotation Stage for Stitching Interference System of Mirror

Huiyun Wang*, Shuaikang Jiang, Shen Wei, Xuewei Du, and Qiuping Wang
Author Affiliations
  • National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230026, Anhui , China
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    Figures & Tables(16)
    Schematic of sub-aperture stitching
    Schematic of hinge
    Schematic of two-dimensional rotation stage. (a) Three-dimensional schematic diagram; (b) pitch; (c) roll; (d) schematic of sinusoidal drive
    First-order mode of rotation stage
    Layout of modal testing measuring points
    Bode diagram
    Stability of rotation stage. (a) Pitch direction; (b) roll direction
    Resolution measurement result of rotation stage. (a) Pitch direction; (b) roll direction
    Attitude measurement result for pitch directional. (a) Rotation angle of rotation stage; (b) aperture attitude parameters
    Attitude measurement result for roll directional. (a) Rotation angle of rotation stage; (b) aperture attitude parameters
    Stitching interference instrument. (a) System diagram; (b) physical diagram
    Tested mirror
    Comparison of stitching middle line and LTP. (a) Comparison of surface height; (b) comparison of slope
    • Table 1. Simulation and experimental results and errors

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      Table 1. Simulation and experimental results and errors

      OrderNatural frequency (test) /HzNatural frequency (simulation) /HzError /%
      148.60048.8410.50
      295.40192.1453.41
      399.40199.7580.34
      4109.601105.7303.53
    • Table 2. Mirror parameters

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      Table 2. Mirror parameters

      Specification21-0014-M3
      Surface shapeplane
      MaterialMono-Si〈100〉
      Dimensions (L×W×H) /(mm×mm×mm)380×50×50
      Clear aperture (L×W) /(mm×mm)360×40
      Tangential radius /km>100
      Sagittal radius /km>30
      Tangential slope /μrad0.82 (RMS)
      Sagittal slope /μrad1.5 (RMS)
      Surface roughness /nm<0.16 (RMS)
    • Table 3. Comparison of stitching middle line and LTP parameters

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      Table 3. Comparison of stitching middle line and LTP parameters

      InstrumentMiddle line surface heightMiddle line slope
      RMS /nmPV /nmRMS /μradPV /μrad
      Stitching19.2176.740.553.49
      LTP20.6492.310.593.39
      Residual7.4022.720.331.78
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    Huiyun Wang, Shuaikang Jiang, Shen Wei, Xuewei Du, Qiuping Wang. High-Precision Flexible Hinge Rotation Stage for Stitching Interference System of Mirror[J]. Laser & Optoelectronics Progress, 2025, 62(5): 0512002

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: May. 11, 2024

    Accepted: Jul. 12, 2024

    Published Online: Mar. 7, 2025

    The Author Email:

    DOI:10.3788/LOP241261

    CSTR:32186.14.LOP241261

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