Laser & Optoelectronics Progress, Volume. 62, Issue 5, 0512002(2025)
High-Precision Flexible Hinge Rotation Stage for Stitching Interference System of Mirror
Fig. 3. Schematic of two-dimensional rotation stage. (a) Three-dimensional schematic diagram; (b) pitch; (c) roll; (d) schematic of sinusoidal drive
Fig. 8. Resolution measurement result of rotation stage. (a) Pitch direction; (b) roll direction
Fig. 9. Attitude measurement result for pitch directional. (a) Rotation angle of rotation stage; (b) aperture attitude parameters
Fig. 10. Attitude measurement result for roll directional. (a) Rotation angle of rotation stage; (b) aperture attitude parameters
Fig. 11. Stitching interference instrument. (a) System diagram; (b) physical diagram
Fig. 13. Comparison of stitching middle line and LTP. (a) Comparison of surface height; (b) comparison of slope
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Huiyun Wang, Shuaikang Jiang, Shen Wei, Xuewei Du, Qiuping Wang. High-Precision Flexible Hinge Rotation Stage for Stitching Interference System of Mirror[J]. Laser & Optoelectronics Progress, 2025, 62(5): 0512002
Category: Instrumentation, Measurement and Metrology
Received: May. 11, 2024
Accepted: Jul. 12, 2024
Published Online: Mar. 7, 2025
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CSTR:32186.14.LOP241261