Laser & Optoelectronics Progress, Volume. 62, Issue 5, 0512002(2025)

High-Precision Flexible Hinge Rotation Stage for Stitching Interference System of Mirror

Huiyun Wang*, Shuaikang Jiang, Shen Wei, Xuewei Du, and Qiuping Wang
Author Affiliations
  • National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230026, Anhui , China
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    In a stitching interference system, a near-zero light path is required to measure the sub-aperture face shape to minimize the effects of phase-measurement errors caused by mechanical vibrations, phase shift inaccuracies, and retrace errors on the measurement results. Therefore, a two-dimensional rotation stage based on a flexible hinge was designed to precisely adjust the measured mirror attitude. A modal analysis of the rotation stage was conducted via finite-element simulation, and the natural frequency was verified experimentally, which showed good consistency with the simulation. This rotation stage, whose angular resolution exceeds 50 nrad, was used to adjust the pitch and roll attitudes of the test mirror. The experimental results indicate good consistency between the adjustment angle of the rotation stage and the attitude change angle of the testing mirror measured using an interferometer. The measurement results of the stitching interference system matched those of the long-trace profiler for the large-aperture flat mirror. The constructed stitching interference system satisfies the preliminary measurement requirements.

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    Huiyun Wang, Shuaikang Jiang, Shen Wei, Xuewei Du, Qiuping Wang. High-Precision Flexible Hinge Rotation Stage for Stitching Interference System of Mirror[J]. Laser & Optoelectronics Progress, 2025, 62(5): 0512002

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: May. 11, 2024

    Accepted: Jul. 12, 2024

    Published Online: Mar. 7, 2025

    The Author Email:

    DOI:10.3788/LOP241261

    CSTR:32186.14.LOP241261

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