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Acta Optica Sinica, Volume. 24, Issue 1, 24(2004)

PECVD Deposition and Characterization of Thick Silica Film for Optical Waveguide

[in Chinese]1、*, [in Chinese]1, [in Chinese]2, [in Chinese]1, and [in Chinese]1
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  • 2[in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. PECVD Deposition and Characterization of Thick Silica Film for Optical Waveguide[J]. Acta Optica Sinica, 2004, 24(1): 24

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    Paper Information

    Category: Fiber Optics and Optical Communications

    Received: Sep. 27, 2002

    Accepted: --

    Published Online: Jun. 12, 2006

    The Author Email: (lflou@hotmail.com)

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology