Chinese Journal of Lasers, Volume. 47, Issue 7, 701005(2020)
Progress in Single-Mode and Directly Modulated Vertical-Cavity Surface-Emitting Lasers
Fig. 4. Schematics of single-mode VCSEL structures. (a) Surface-relief VCSEL; (b) implantation/oxidation hybrid aperture VCSEL; (c) multi-oxide aperture VCSEL; (d) metal-aperture VCSEL; (e) Zn-diffusion aperture VCSEL; (f) holey VCSEL; (g) subwavelength grating VCSEL; (h) coupled-cavity VCSEL
Fig. 6. Broadband high-reflectivity HCG[103]. (a) Schematic of HCG; (b) principle of HCG with broadband and high reflectivity of HCG
Fig. 8. HCG-VCSELs for photonic integrated circuits. (a) Schematic of Si-based HCG-VCSEL at 1550 nm (SOI-based HCG as reflector)[124]; (b) schematic of Si-based HCG-VCSEL (SOI-based HCG as reflector and coupler)[125]; (c) schematic of VCSEL with horizontal output waveguide (SiN-based HCG as coupler)[126]
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Liu Anjin. Progress in Single-Mode and Directly Modulated Vertical-Cavity Surface-Emitting Lasers[J]. Chinese Journal of Lasers, 2020, 47(7): 701005
Special Issue:
Received: Jan. 6, 2020
Accepted: --
Published Online: Jul. 10, 2020
The Author Email: Liu Anjin (liuanjin@semi.ac.cn)