Chinese Journal of Lasers, Volume. 37, Issue 8, 2051(2010)

Impact of Evaporation Characteristics of SiO2 on Uniformity of Thin-Film Thickness

Wang Ning1,2、*, Shao Jianda1, Yi Kui1, and Wei Chaoyang1
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    References(10)

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    Wang Ning, Shao Jianda, Yi Kui, Wei Chaoyang. Impact of Evaporation Characteristics of SiO2 on Uniformity of Thin-Film Thickness[J]. Chinese Journal of Lasers, 2010, 37(8): 2051

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    Paper Information

    Category: materials and thin films

    Received: Nov. 18, 2009

    Accepted: --

    Published Online: Aug. 13, 2010

    The Author Email: Ning Wang (shumangy@126.com)

    DOI:10.3788/cjl20103708.2051

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