[1] LI M J, LI K, CHEN X et al. Single-mode VCSEL transmission for short reach communications[J]. Journal of Lightwave Technology, 39, 868-880(2021).

[2] [2] ZHOU D, SEURIN J F, XU G, et al. Progress on highpower highbrightness VCSELs applications[C]VerticalCavity SurfaceEmitting Lasers XIX, SPIE, 2015, 9381: 91102.

[3] TONG Haixia, TONG Cunzhu, WANG Ziye. Advances in the technology of 850 nm high-speed vertical cavity surface emitting lasers[J]. Infrared and Laser Engineering, 49, 20201077(2020).

[4] IGA K. Surface-emitting laser-its birth and generation of new optoelectronics field[J]. IEEE Journal of Selected Topics in Quantum Electronics, 6, 1201-1215(2000).

[5] HIGUCHI A, NAITO H, TORII K et al. High power density vertical-cavity surface-emitting lasers with ion implanted isolated current aperture[J]. Optics Express, 20, 4206-4212(2012).

[6] FENG I W, JIN S, LI J et al. SiO₂/TiO₂ distributed Bragg reflector near 1.5 μm fabricated by e-beam evaporation[J]. Journal of Vacuum Science & Technology A, 31, 061514(2013).

[7] DAI J, GAO W, LIU B et al. Design and fabrication of UV band-pass filters based on SiO₂/Si₃N₄ dielectric distributed bragg reflectors[J]. Applied Surface Science, 364, 886-891(2016).

[8] RATAJCZAK R, GACA J, WÓJCIK W et al. Structural analysis of distributed Bragg reflector mirrors[J]. Vacuum, 83, S148-S151(2009).

[9] RÉVERET F, BIGNET L, WANG Z G et al. High reflectance dielectric distributed Bragg reflectors for near ultra-violet planar microcavities: SiO₂/HfO₂ versus SiO₂/SiN_x[J]. Journal of Applied Physics, 120, 093107(2016).

[10] MRÁZEK J, SPANHEL L, MATĚJEC V et al. Nanocrystalline Zn₂TiO₄ films for distributed Bragg's reflectors operating in near infrared region[J]. Optical Materials, 112, 110805(2021).

[11] HAMAGUCHI T, NAKAJIMA H, FUUTAGAWA N. GaN-based vertical-cavity surface-emitting lasers incorporating dielectric distributed Bragg reflectors[J]. Applied Sciences, 9, 733-745(2019).

[12] GAO B, GEORGE J P, BEECKMAN J et al. Design, fabrication and characterization of a distributed Bragg reflector for reducing the étendue of a wavelength converting system[J]. Optics Express, 28, 12837-12846(2020).

[13] MENG Yang, TAO Haijun, LIU Huasong. Effect of thickness on the optical and mechanical properties of ZnS thin films[J]. Infrared and Laser Engineering, 54, 20240515(2025).

[14] WANG L S, JIANG Y G, JIANG C H et al. Effect of oxygen flow rate on microstructure properties of SiO₂ thin films prepared by ion beam sputtering[J]. Journal of Non-Crystalline Solids, 482, 203-207(2018).

[15] HUANG J J, DUAN X F, LIU K et al. Fixed focus grating reflector based on hybrid optimization method[J]. IEEE Photonics Technology Letters, 37, 13-16(2024).

[16] SIROTA B, GLAVIN N, VOEVODIN A A. Room temperature magnetron sputtering and laser annealing of ultrathin MoS₂ for flexible transistors[J]. Vacuum, 160, 133-138(2019).

[17] ADEL Ismael Chaqmaqchee F, LOTT J A. Impact of oxide aperture diameter on optical output power, spectral emission, and bandwidth for 980 nm VCSELs[J]. OSA Continuum, 3, 2602-2613(2020).

[18] JASIM F Z, OMAR K, HASSAN Z. Temperature effect on VCSEL output performance[J]. Journal of Optoelectronics and Advanced Materials, 3, 1136-1138(2009).