Infrared and Laser Engineering, Volume. 54, Issue 7, 20250059(2025)

Study of SiO2/ZnS-based broadband mirror vertical cavity surface emitting laser

Xiaodong YAN, Jinbao SU*, Bo WU, Ying LIU, Jun DENG, and Yiyang XIE
Author Affiliations
  • Key Laboratory of Optoelectronics Technology, Ministry of Education, School of Information Science and Technology, Beijing University of Technology, Beijing 100124, China
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    Figures & Tables(11)
    A multilayer medium composed of N consecutive uniform dielectric layers
    The relationship between the material's refractive index and wavelength
    (a) Reflectance of DBR structures with different periods; (b) Reflection spectra of DBR structures with periods of 4, 6, and 8 over a broad wavelength range
    (a) The relationship between the thickness of the SiO2 layer and the reflection bandwidth; (b) The relationship between the thickness of the ZnS layer and the reflection bandwidth
    Schematic diagram of the fabrication process for a broadband SiO2/ZnS mirror-based VCSEL
    Reflection spectra of DBR structures deposited on different substrates. (a) Quartz glass; (b) GaAs
    SEM images of the SiO2/ZnS DBR cross-section at different magnifications. (a) 5000 ×; (b) 20000 ×
    The microscope images of VCSEL devices with different oxidation apertures. (a) 6 μm; (b) 8 μm
    The P-I-V curves and spectra of VCSEL devices with different oxidation apertures. (a), (c) 6 μm; (b), (d) 8 μm
    Reflection spectra of DBR structures deposited on different substrates. (a), (b) 6 μm; (c), (d) 8 μm
    P-I-V and spectral characteristics of a DBR-based device with a 50 nm center wavelength shift. (a) P-I-V characteristics; (b) Spectral characteristics
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    Xiaodong YAN, Jinbao SU, Bo WU, Ying LIU, Jun DENG, Yiyang XIE. Study of SiO2/ZnS-based broadband mirror vertical cavity surface emitting laser[J]. Infrared and Laser Engineering, 2025, 54(7): 20250059

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    Paper Information

    Category: Laser

    Received: Jan. 17, 2025

    Accepted: --

    Published Online: Aug. 29, 2025

    The Author Email: Jinbao SU (sujinbao@bjut.edu.cn)

    DOI:10.3788/IRLA20250059

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