Fig. 1. Design of beam steering system. (a) Structure of photonic integrated circuits; (b) composition of beam steering system; (c) beam steering mode; (d) cone lens cross-section profile

Fig. 2. Numerical simulation results of unit cells with metalens. (a) Schematic of a unit cell; (b) phase profile and transmission function of unit cells with different diameters at 1550 nm; (c) schematic of overall metalens

Fig. 3. Optimized phase distributions at different positions of metalens and spot diagrams of optical beam steering system in different vertical FOVs

Fig. 4. Phase profile of target phase and actual phase of metalens

Fig. 5. Design results of optical beam steering system. (a) Schematic of beam steering in vertical direction; (b) schematic of beam steering in horizontal direction (top view); (c) schematic of beam steering in horizontal direction (front view)

Fig. 6. Analysis of design results. (a) Irradiance maps of target surface at different positions; (b) luminous intensity profiles in horizontal direction of six groups of emitting beams; (c) luminous intensity profiles in vertical direction of six groups of emitting beams; (d) irradiance distribution of outgoing beam in different angular positions in vertical direction

Fig. 7. Structure of grating coupler and intensity distribution of a beam passing through grating coupler. (a) Side view of single grating coupler; (b) perspective view of single grating coupler; (c) near-field intensity distribution; (d) three-dimensional intensity distribution; (e) beam intensity profile in X-direction; (f) beam intensity profile in Y-direction

Fig. 8. Three-dimensional intensity distribution of steered beam. (a) Normalized intensity distribution of output beam; (b) normalized intensity distribution of output beam directed to different angular positions

Fig. 9. Emitting unit and receiving unit of LiDAR system. (a) Emitting unit and receiving unit; (b) receiving unit; (c) structure of receiving unit