Journal of Synthetic Crystals, Volume. 51, Issue 12, 2031(2022)
Prediction Model of Diameter of Czochralski Silicon Single Crystal Based on NARX Dynamic Neural Network
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XU Shengzhe, GAO Dedong, WANG Shan, WU Haohao, ZHANG Xiya, HAN Yonglong, LI Lirong. Prediction Model of Diameter of Czochralski Silicon Single Crystal Based on NARX Dynamic Neural Network[J]. Journal of Synthetic Crystals, 2022, 51(12): 2031
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Received: May. 9, 2022
Accepted: --
Published Online: Feb. 18, 2023
The Author Email: XU Shengzhe (xushengzhe666@163.com)
CSTR:32186.14.
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