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Journal of Synthetic Crystals, Volume. 51, Issue 12, 2031(2022)

Prediction Model of Diameter of Czochralski Silicon Single Crystal Based on NARX Dynamic Neural Network

XU Shengzhe1、*, GAO Dedong1, WANG Shan1, WU Haohao1, ZHANG Xiya1, HAN Yonglong2, and LI Lirong1
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    XU Shengzhe, GAO Dedong, WANG Shan, WU Haohao, ZHANG Xiya, HAN Yonglong, LI Lirong. Prediction Model of Diameter of Czochralski Silicon Single Crystal Based on NARX Dynamic Neural Network[J]. Journal of Synthetic Crystals, 2022, 51(12): 2031

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    Paper Information

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    Received: May. 9, 2022

    Accepted: --

    Published Online: Feb. 18, 2023

    The Author Email: XU Shengzhe (xushengzhe666@163.com)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology