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Optical Technique, Volume. 51, Issue 2, 252(2025)

Thin-film ellipsometry measurement based on Fourier infrared spectroscopy

WU Chuanchao1,2, SU Hongjin2, ZHANG Zhixiang1,2, ZHANG Jiaying1,2, XUE Peng2、*, and ZHANG Rui1,2
Author Affiliations
  • 1School of Information and Communication Engineering, North University of China, Taiyuan 030051, China
  • 2Technology Innovation Center of Shanxi Provincial for Intelligent Microwave Photoelectric, North University of China, Taiyuan 030051, China
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    WU Chuanchao, SU Hongjin, ZHANG Zhixiang, ZHANG Jiaying, XUE Peng, ZHANG Rui. Thin-film ellipsometry measurement based on Fourier infrared spectroscopy[J]. Optical Technique, 2025, 51(2): 252

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    Paper Information

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    Received: Nov. 13, 2024

    Accepted: Apr. 22, 2025

    Published Online: Apr. 22, 2025

    The Author Email: XUE Peng (xuepeng@nuc.edu.cn)

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology