Acta Optica Sinica, Volume. 43, Issue 11, 1131001(2023)

Preparation and Properties of Sol-Gel ZrO2/SiO2 Broadband Antireflective Film

Bin Shen1,2、*, Xu Zhang1, Huai Xiong1, Haiyuan Li1, and Xinglong Xie1,2
Author Affiliations
  • 1Key Laboratory of High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
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    References(19)

    [1] Zhu J Q, Chen S H, Zheng Y X et al. Review on development of Shenguang-Ⅱ laser facility[J]. Chinese Journal of Lasers, 46, 0100002(2019).

    [2] Wang M, Zheng Y C, Liu Z K et al. Meniscus and spin coating methods for coating SiO2 Sol-gel antireflective film on beam sampling grating[J]. Laser & Optoelectronics Progress, 59, 0105001(2022).

    [3] Wen J H, Zhu M P, Sun J et al. Research progress on absorption loss control of laser coating[J]. Acta Optica Sinica, 42, 0700001(2022).

    [4] Belleville P F, Prene P, Bonnin C et al. How smooth chemistry allows high power laser optical coating preparation[J]. Proceedings of SPIE, 5250, 196-202(2004).

    [5] Thomas I M. A two-layer broadband antireflective coating prepared from methyl silicone and porous silica[J]. Proceedings of SPIE, 3136, 215-219(1997).

    [6] Tang Y X, Li H Y, Yan H H et al. Sol-gel antireflective(AR) and moisture-resistant coatings with high laser damage thresholds[J]. Rare Metal Materials and Engineering, 33, 125-128(2004).

    [7] Sun Y Y, Hu X Y, Zhang H J et al. SiO2-ORMOSIL double-layered broadband antireflective coating for high-power laser system[J]. Journal of Sol-Gel Science and Technology, 79, 558-563(2016).

    [8] Li H Y, Tang Y X, Hu L L. Preparation of ZrO2/SiO2 antireflective hard coating from Sol-gel processing[J]. Acta Optica Sinica, 29, 556-559(2009).

    [9] Shen B, Xiong H, Zhang X et al. Post-treatment of 351 nm SiO2 antireflective coatings for high power laser systems prepared by the Sol-gel method[J]. Chinese Optics Letters, 20, 011601(2022).

    [10] Zhu S J, Wang S L, Liu L et al. Refractive index homogeneity of large scale potassium dihydrogen phosphate crystal[J]. Acta Physica Sinica, 63, 107701(2014).

    [11] Tao Z Y. Preparation and properties of multifunctional SiO2 antireflection film by Sol-gel method[D], 4(2017).

    [12] Tang J F, Zheng Q[M]. Applied thin film optics, 125-131(1984).

    [13] Zhang Y P, Xu H, Ling N et al. The study on a new design method of three layers antireflecting coating W with two wavelengths[J]. Optoelectronic Technology & Information, 1, 22-24(2006).

    [14] Sun Y, Mu X M, Wang S L et al. Effect of annealing condition on the optical quality of KDP crystal[J]. Journal of Synthetic Crystals, 40, 832-837(2011).

    [15] Xiong H. Study on SiO2 _ 2-based moisture-proof antireflection film of KDP crystal[D], 19(2010).

    [16] Xu Q, Wang J, Ma P et al. Progress of advanced optical manufacturing technology[J]. High Power Laser and Particle Beams, 25, 3098-3105(2013).

    [17] Zhang F H, Zhang Q. Ultra-precision fly-cutting processing technology and equipment for large-aperture KDP crystal optical elements[J]. Metal Working (Metal Cutting), 1-5(2021).

    [18] Liu T B, Zhu M P, Du W Y et al. A nodule dome removal strategy to improve the laser-induced damage threshold of coatings[J]. High Power Laser Science and Engineering, 10, e30(2022).

    [19] Pu T Y, Liu W W, Wang Y L et al. A novel laser shock post-processing technique on the laser-induced damage resistance of 1ω HfO2/SiO2 multilayer coatings[J]. High Power Laser Science and Engineering, 9, e19(2021).

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    Bin Shen, Xu Zhang, Huai Xiong, Haiyuan Li, Xinglong Xie. Preparation and Properties of Sol-Gel ZrO2/SiO2 Broadband Antireflective Film[J]. Acta Optica Sinica, 2023, 43(11): 1131001

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    Paper Information

    Category: Thin Films

    Received: Nov. 10, 2022

    Accepted: Feb. 6, 2023

    Published Online: May. 29, 2023

    The Author Email: Shen Bin (bingo2011@siom.ac.cn)

    DOI:10.3788/AOS221964

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