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Acta Optica Sinica, Volume. 43, Issue 11, 1131001(2023)

Preparation and Properties of Sol-Gel ZrO2/SiO2 Broadband Antireflective Film

Bin Shen1,2、*, Xu Zhang1, Huai Xiong1, Haiyuan Li1, and Xinglong Xie1,2
Author Affiliations
  • 1Key Laboratory of High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (8)
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    References (19)
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    Figures & Tables(8)
    Simulation curves of three-layer "wide M-type" antireflective film

    Fig. 1. Simulation curves of three-layer "wide M-type" antireflective film

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    Refractive index tests of ZrO2 film heat treatment at different temperatures. (a) Refractive index; (b) absorption coefficient

    Fig. 2. Refractive index tests of ZrO2 film heat treatment at different temperatures. (a) Refractive index; (b) absorption coefficient

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    Optical properties of "wide M-type" film. (a) Curves of transmittance; (b) film uniformity

    Fig. 3. Optical properties of "wide M-type" film. (a) Curves of transmittance; (b) film uniformity

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    Comparison of optical properties of films

    Fig. 4. Comparison of optical properties of films

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    Surface roughness of each film

    Fig. 5. Surface roughness of each film

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    SEM images of substrate with three-layer antireflective films. (a) ZrO2 surface; (b) SiO2-MR surface; (c) SiO2-AR surface; (d) cross-section

    Fig. 6. SEM images of substrate with three-layer antireflective films. (a) ZrO2 surface; (b) SiO2-MR surface; (c) SiO2-AR surface; (d) cross-section

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    Laser damage properties. (a) Laser-induced damage threshold (LIDT) of films; (b) damage morphology of blank K9; (c) damage morphology of three-layer film; (d) damage morphology of two-layer film

    Fig. 7. Laser damage properties. (a) Laser-induced damage threshold (LIDT) of films; (b) damage morphology of blank K9; (c) damage morphology of three-layer film; (d) damage morphology of two-layer film

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    • Table 1. Pore characteristics of three gel powders

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      Table 1. Pore characteristics of three gel powders

      SampleSurface area /（m2·g-1）Pore radius /nmPore volume /（cm3·g-1）
      ZrO2—1.13848×10-5
      SiO2-MR—1.1727.1×10-5
      SiO2-AR297.90487.71750.574773
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    Bin Shen, Xu Zhang, Huai Xiong, Haiyuan Li, Xinglong Xie. Preparation and Properties of Sol-Gel ZrO2/SiO2 Broadband Antireflective Film[J]. Acta Optica Sinica, 2023, 43(11): 1131001

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    Paper Information

    Category: Thin Films

    Received: Nov. 10, 2022

    Accepted: Feb. 6, 2023

    Published Online: May. 29, 2023

    The Author Email: Shen Bin (bingo2011@siom.ac.cn)

    DOI:10.3788/AOS221964

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology