Chinese Journal of Lasers, Volume. 48, Issue 11, 1100001(2021)
Advances in Ga2O3-Based Solar-Blind Ultraviolet Photodetectors
Fig. 2. Morphology of β-Ga2O3 nanowires and photoelectric response of device[152]. (a) SEM image of the β-Ga2O3 nanowires grown on the Au-coated silicon substrate; (b) I-V curves of the detector under 254 nm light illumination and dark condition (inset); (c) time response of the device to light at 254 nm; (d) enlargement of the rising and falling edges for the light “on” and “off” for the first time
Fig. 3. Structural characteristics of Ga2O3 and performance of the device[135]. (a) X-ray diffraction (XRD) pattern of the α-Ga2O3 grown on the sapphire substrate. The inset shows the schematic of the device structure; (b) spectral responsivity of the photodetectors at 5 V bias; (c) I-V characteristics of the devices in the dark (black line) and under illumination
Fig. 4. Structure and electrical characteristics of the device based on β-Ga2O3 flake[72]. (a) Schematic of the preparation process of the β-Ga2O3 flake based solar-blind photodetector; (b) optical microscopy image of the device; (c) typical electrical properties of the β-Ga2O3 flake based FETs; (d) time-dependent photoresponse of the photodetector under illumination at different wavelengths; (e) responsivity as a function of wavelength
Fig. 5. Ga2O3 photodetector and its performance test. (a) Fabrication process of photodetector[142]; (b) current-voltage (I-V) characteristics of photodetector. Filled and hollow dots represent current in the dark condition and 250 nm-light irradiationv, respectively[142]; (c) responsivity and photocurrent response of the photodetector at reverse bias of 10 V[142]; (d) photograph of the flame detector[162]; (e) transient response of the detector[162]; (f) signal from the flame detection system[162]
Fig. 6. Performance of the Ga2O3 Schottky photodiode[18]. (a) Dark I-V characteristics of the Au-Ga2O3 Schottky photodiode annealed at various temperatures; (b) spectral response of the device before and after annealing
Fig. 7. Crystal wafer of Ga2O3 and time response of the device[163]. (a)(b) Epitaxial wafer and AFM image of the Ga2O3; (c) time response of the photodetector with the β-Ga2O3 MSM structure
Fig. 8. Configuration and its photoresponse of the narrow-band detector based on β-Ga2O3 single crystal[166]. (a) AFM image of the (100) β-Ga2O3 single crystal; (b) configuration of the narrow-band detector combined with an orthogonally aligned filter; (c) photoresponsivity as a function of chopper modulation frequency; (d) fitting of waveform curves of transient photoresponse measured at 150 Hz
Fig. 9. Schematic diagram and measured I-V characteristic curves of the fabricated β-Ga2O3 photodetector. (a) Schematic diagram of the fabricated β-Ga2O3 photodetector; (b) measured I-V characteristic curves
Fig. 10. Structural schematic of the device and its spectral response [168]. (a) Structural schematic of β-Ga2O3 single-crystal photodiode; (b) spectral response of Ga2O3 photodiodes with and without a cap layer at reverse and forward biases of 3 V
Fig. 12. Electrical characteristics and spectral response of Ga2O3 solar-blind photodetectors. (a) I-V characteristics of the annealed β-Ga2O3 thin film at 800 ℃[184]; (b) I-V curves of the MSM ε-Ga2O3 photodetector in the dark at variable temperatures[136]; (c) R and D* as functions of the wavelength of the MSM ε-Ga2O3 photodetector at a bias of 6 V[136]; (d) magnified fall edge of the I-t characteristic curves[136]
Fig. 14. Principle of photoresponse and spectral response of the device. (a) Normalized transient photoresponse characteristics at room temperature[212]; (b) photoconductive gain and avalanche multiplication gain for the device as functions of applied bias[212]; (c) energy band diagram at high reverse bias under 254 nm illumination[212]; (d) HRTEM images acquired from sample[214]; (e) pulse photocurrent as a function of the time of the Ga2O3 thin-film photodetectors[214]; (f) spectral responsivity of the device at bias of 5 V[214]
Fig. 15. Fabrication process and photoelectric properties of β-Ga2O3 nanowires photodiode[145]. (a) Schematic illustration of the fabrication of β-Ga2O3 nanowires array film and its vertical Schottky photodiode; (b) I-V characteristics of device in dark and under the illumination at 254 nm; (c) spectral response of the device
Fig. 16. Imaging and photoresponse of β-Ga2O3 photodetectors. (a) Spectral response of the diamond/β-Ga2O3 photodetector at 0 V bias[148]; (b) image of the object with letters “UV” on a black paper and the image obtained from the imaging system[148]; (c) I-V curves of the MoS2/β-Ga2O3 heterojunction device[151]; (d) time-dependent photoresponse of the device[151]; (e) typical PEC system built for evaluating the photoresponse behaviors of the α-Ga2O3 NA/Cu2O photodetector[227]; (f) transient response current for the photodetector at zero bias[227]
Fig. 17. Spectral response and impulse response of β-Ga2O3 photodetector. (a) Photocurrent and power density as functions of excitation wavelength[230]; (b) spectral response of reference β-Ga2O3 photodetector at 1V bias and β-Ga2O3/PANI at zero bias[230]; (c) spectral responsivity and corresponding absorption spectrum of the photodetector[233]; (d) time response of the photodetector for the 248nm pulse laser without bias[233]
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Jiang Wang, Linbao Luo. Advances in Ga2O3-Based Solar-Blind Ultraviolet Photodetectors[J]. Chinese Journal of Lasers, 2021, 48(11): 1100001
Category: reviews
Received: Sep. 16, 2020
Accepted: Dec. 28, 2020
Published Online: Apr. 28, 2021
The Author Email: Luo Linbao (luolb@hfut.edu.cn)