Algorithm and Experiment of Silicon Wafer Multifocus Laser Stealth Dicing

Huaizhi Zhang; Jiaming Xu; Lantian Zhang; Yingxiong Qin

doi:10.3788/CJL202249.0202018

Chinese Journal of Lasers, Volume. 49, Issue 2, 0202018(2022)

Algorithm and Experiment of Silicon Wafer Multifocus Laser Stealth Dicing

Huaizhi Zhang, Jiaming Xu, Lantian Zhang, and Yingxiong Qin^*

School of Optical and Electronic Information, Huazhong University of Science and Technology, National Engineering Research for Laser Processing, Wuhan, Hubei 430074, China

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Huaizhi Zhang, Jiaming Xu, Lantian Zhang, Yingxiong Qin. Algorithm and Experiment of Silicon Wafer Multifocus Laser Stealth Dicing[J]. Chinese Journal of Lasers, 2022, 49(2): 0202018

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Paper Information

Category: laser manufacturing

Received: Jun. 28, 2021

Accepted: Aug. 9, 2021

Published Online: Jan. 11, 2022

The Author Email: Qin Yingxiong (qyx@hust.edu.cn)

DOI:10.3788/CJL202249.0202018

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology