Chinese Journal of Lasers, Volume. 26, Issue 8, 706(1999)

Study of Surface Topographic Measurement by a Mirau Correlation Microscope

[in Chinese], [in Chinese], and [in Chinese]
Author Affiliations
  • [in Chinese]
  • show less
    References(4)

    [2] [2] S. S. C. Chim, G. S. Kino. Correlation microscope. Opt. Lett., 1990,15(10):579~581

    [3] [3] G. S. Kino, S. S. C. Chim. Mirau correlation microscope. Appl. Opt., 1990,29(26):3775~3783

    [5] [5] Ding Zhihua, Wang Guiying, Wang Zhijiang, Noncontact measurement of surface topography by Mirau interferometer. Chinese J. Lasers, 1996,B5(4):355~362

    [6] [6] S. S. C. Chim, G. S. Kino. Phase measurements using the Mirau correlation microscope. Appl. Opt., 1991,30:2197~2201

    Tools

    Get Citation

    Copy Citation Text

    [in Chinese], [in Chinese], [in Chinese]. Study of Surface Topographic Measurement by a Mirau Correlation Microscope[J]. Chinese Journal of Lasers, 1999, 26(8): 706

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Mar. 5, 1998

    Accepted: --

    Published Online: Aug. 9, 2006

    The Author Email:

    DOI:

    Topics