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Chinese Journal of Lasers, Volume. 26, Issue 8, 706(1999)

Study of Surface Topographic Measurement by a Mirau Correlation Microscope

[in Chinese], [in Chinese], and [in Chinese]
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    [in Chinese], [in Chinese], [in Chinese]. Study of Surface Topographic Measurement by a Mirau Correlation Microscope[J]. Chinese Journal of Lasers, 1999, 26(8): 706

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    Received: Mar. 5, 1998

    Accepted: --

    Published Online: Aug. 9, 2006

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology