Acta Optica Sinica, Volume. 42, Issue 15, 1512003(2022)

Fast Vertical Scanning Topography Measurement Based on Spectral Distribution Characteristics

Juntao Zhou, Zhishan Gao, Yifeng Sun, Jianqiu Ma, Pengfei Xie, Jiale Zhang, Zhenyan Guo, and Qun Yuan*
Author Affiliations
  • School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing 210094, Jiangsu , China
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    Juntao Zhou, Zhishan Gao, Yifeng Sun, Jianqiu Ma, Pengfei Xie, Jiale Zhang, Zhenyan Guo, Qun Yuan. Fast Vertical Scanning Topography Measurement Based on Spectral Distribution Characteristics[J]. Acta Optica Sinica, 2022, 42(15): 1512003

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jan. 10, 2022

    Accepted: Mar. 3, 2022

    Published Online: Aug. 4, 2022

    The Author Email: Qun Yuan (yuanqun@njust.edu.cn)

    DOI:10.3788/AOS202242.1512003

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