Fig. 1. Schematic diagram of fast vertical scanning topography measurement

Fig. 2. Schematic diagram of different coarse scanning steps

Fig. 3. Image acquisition situation varying with starting point of coarse scanning; (a) Acquisition of n+1 images; (b) acquisition of n images

Fig. 4. Schematic diagram of finding image acquisition area of upper surface

Fig. 5. Flow chart of fast vertical scanning topography measurement

Fig. 6. Recovered three-dimensional surface topography and cross-sectional view of step. (a) Three-dimensional surface topography; (b) cross-sectional view

Fig. 7. Recovered three-dimensional surface topography and cross-sectional view of groove. (a) Three-dimensional surface topography; (b) cross-sectional view