Three-Dimensional Microscopic Measurement Based on Gradient Variance for Focus Evaluation

Zhengqiong Dong; Qingfeng Yang; Xianwen Huang; Jingyi Wang; Yijun Xie; Renlong Zhu; Xiangdong Zhou; Lei Nie

doi:10.3788/LOP232028

Laser & Optoelectronics Progress, Volume. 61, Issue 14, 1412003(2024)

Three-Dimensional Microscopic Measurement Based on Gradient Variance for Focus Evaluation

Zhengqiong Dong, Qingfeng Yang, Xianwen Huang, Jingyi Wang, Yijun Xie, Renlong Zhu, Xiangdong Zhou, and Lei Nie^*

Hubei Key Laboratory of Modern Manufacture Quality Engineering, School of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, Hubei , China

show less

Abstract Get PDF(in Chinese)

Figures & Tables(9)

Fig. 1. Principle of focused microscopic measurement. (a) Imaging principle; (b) image sequence

Download full size

Fig. 2. Experimental platform

Download full size

Fig. 3. Standard step sample block

Download full size

Fig. 4. Comparison of focus evaluation curves

Download full size

Fig. 5. Results of the step reconstruction

Download full size

Fig. 6. Results of M4 bolt reconstruction

Download full size

Table 1. Quantitative evaluation indicators
View table
Table 1. Quantitative evaluation indicators
Function R f_sen
Brenner 0.5304 68.41
Rob_SMD 0.9122 118.37
Tenengrad 0.1743 21.81
Bren3_Rob 2.3540 307.04
Laplace 0.4491 57.77
Proposed method 2.4412 318.45

Table 2. Height measurement results
View table
Table 2. Height measurement results
Function Depth /mm Error /%
Brenner 0.9878 1.22
Rob_SMD 0.9899 1.01
Tenengrad 0.9879 1.21
Bren3_Rob 0.9917 0.83
Laplace 0.9889 1.11
Proposed method 0.9951 0.49

Table 3. Multiple height measurement results of the proposed method
View table
Table 3. Multiple height measurement results of the proposed method
Measurement No. Depth /mm Error /μm
Average value 1.00240 2.40
1 1.00249 2.49
2 1.00230 2.30
3 1.00241 2.41
4 1.00245 2.45
5 1.00232 2.32
6
7
8
1.00242
1.00237
1.00244
2.42
2.37
2.44

Tools

Get Citation

Copy Citation Text

Zhengqiong Dong, Qingfeng Yang, Xianwen Huang, Jingyi Wang, Yijun Xie, Renlong Zhu, Xiangdong Zhou, Lei Nie. Three-Dimensional Microscopic Measurement Based on Gradient Variance for Focus Evaluation[J]. Laser & Optoelectronics Progress, 2024, 61(14): 1412003

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites