Laser & Optoelectronics Progress, Volume. 61, Issue 14, 1412003(2024)

Three-Dimensional Microscopic Measurement Based on Gradient Variance for Focus Evaluation

Zhengqiong Dong, Qingfeng Yang, Xianwen Huang, Jingyi Wang, Yijun Xie, Renlong Zhu, Xiangdong Zhou, and Lei Nie*
Author Affiliations
  • Hubei Key Laboratory of Modern Manufacture Quality Engineering, School of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, Hubei , China
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    Zhengqiong Dong, Qingfeng Yang, Xianwen Huang, Jingyi Wang, Yijun Xie, Renlong Zhu, Xiangdong Zhou, Lei Nie. Three-Dimensional Microscopic Measurement Based on Gradient Variance for Focus Evaluation[J]. Laser & Optoelectronics Progress, 2024, 61(14): 1412003

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Sep. 4, 2023

    Accepted: Dec. 14, 2023

    Published Online: Jul. 17, 2024

    The Author Email: Lei Nie (leinie@hbut.edu.cn)

    DOI:10.3788/LOP232028

    CSTR:32186.14.LOP232028

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