Laser & Optoelectronics Progress, Volume. 61, Issue 14, 1412003(2024)

Three-Dimensional Microscopic Measurement Based on Gradient Variance for Focus Evaluation

Zhengqiong Dong, Qingfeng Yang, Xianwen Huang, Jingyi Wang, Yijun Xie, Renlong Zhu, Xiangdong Zhou, and Lei Nie*
Author Affiliations
  • Hubei Key Laboratory of Modern Manufacture Quality Engineering, School of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, Hubei , China
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    A three-dimensional microscopic measurement based on gradient variance is proposed for focus evaluation to achieve high-precision focusing. Building upon the traditional Brenner evaluation function, this method incorporated information on changes in the grayscale gradient along the vertical and diagonal directions. Additionally, by capturing richer image edge details, it enhances the sensitivity of the focus evaluation function, thereby improving the accuracy of three-dimensional microscopic measurements. Experiments with a step sample having a nominal height of 1 mm were conducted, yielding a relative measurement error of 0.49% (relative to the standard value) for the proposed method, outperforming traditional focus evaluation methods with an error of 1.22%. Furthermore, for the evaluation function, the proposed method exhibits a clarity ratio and a sensitivity with values of 2.4412 and 318.45, respectively.

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    Zhengqiong Dong, Qingfeng Yang, Xianwen Huang, Jingyi Wang, Yijun Xie, Renlong Zhu, Xiangdong Zhou, Lei Nie. Three-Dimensional Microscopic Measurement Based on Gradient Variance for Focus Evaluation[J]. Laser & Optoelectronics Progress, 2024, 61(14): 1412003

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Sep. 4, 2023

    Accepted: Dec. 14, 2023

    Published Online: Jul. 17, 2024

    The Author Email: Lei Nie (leinie@hbut.edu.cn)

    DOI:10.3788/LOP232028

    CSTR:32186.14.LOP232028

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