Infrared Technology, Volume. 47, Issue 5, 571(2025)

Bonding of Ceramic Substrate and CMOS Chip of EBAPS Devices

Hesheng TAN1, Mingxin CHEN1, Heng ZHAO1,2, Lingyan WANG1, Wenbo YANG1, Huabing DENG1, Yingkun JIN1, Yunxiang FENG1, Lichun DAO1, and Kunlin ZHANG1、*
Author Affiliations
  • 1North Night Vision Technology Co., Ltd., Kunming 650214, China
  • 2National Key Laboratory of Infrared Detection, Kunming 650223, China
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    References(3)

    [7] [7] Barbier R, Cajgfinger T, Calabria P, et al. A single-photon sensitive EBCMOS camera: The LUSIPHER prototype[J].Nuclear Instruments and Methods in Physics Research A, 2011,648: 266-274.

    [8] [8] WANG Wei, LI Ye, SONG De, et al. Research on chip thinning technology[C]//Proc. SPIE, SixthSymposium on Novel Optoelectronic Detection Technology and Applications, 2020: 114556S, doi: 10.1117/12.2565288.

    [10] [10] Andreas Larsson, Torleif A Tollefsen, Ole Martin Lovik, et al. A review of eutectic Au-Ge solder joints[J].Metallurgical And Materials Transactions A, 2019, https://doi.org/10.1007/s11661-019-05356-0.

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    TAN Hesheng, CHEN Mingxin, ZHAO Heng, WANG Lingyan, YANG Wenbo, DENG Huabing, JIN Yingkun, FENG Yunxiang, DAO Lichun, ZHANG Kunlin. Bonding of Ceramic Substrate and CMOS Chip of EBAPS Devices[J]. Infrared Technology, 2025, 47(5): 571

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    Paper Information

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    Received: Jan. 20, 2022

    Accepted: Jul. 3, 2025

    Published Online: Jul. 3, 2025

    The Author Email: ZHANG Kunlin (zkl.2004@126.com)

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