Infrared Technology, Volume. 47, Issue 5, 571(2025)

Bonding of Ceramic Substrate and CMOS Chip of EBAPS Devices

Hesheng TAN1, Mingxin CHEN1, Heng ZHAO1,2, Lingyan WANG1, Wenbo YANG1, Huabing DENG1, Yingkun JIN1, Yunxiang FENG1, Lichun DAO1, and Kunlin ZHANG1、*
Author Affiliations
  • 1North Night Vision Technology Co., Ltd., Kunming 650214, China
  • 2National Key Laboratory of Infrared Detection, Kunming 650223, China
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    An electron bombardment active pixel sensor (EBAPS) is a hybrid optoelectronic imaging device that combines vacuum and solid-state devices. Its vacuum sealing requires high-temperature baking and degassing processes. During development, a key challenge is addressing the issue of the epoxy adhesive used to bond the silicon-based chip in the complementary metal oxide semiconductor (CMOS) image sensor to the ceramic base, which may decompose at high temperatures, causing the CMOS chip to detach and fail to capture images. To address this, the project team used three types of solder alloys with similar melting points: Au88Ge12, Pb92.5In5Ag2.5, and Zn-Al-Ag-Cu to bond the metallized CMOS silicon-based chip to the ceramic base. The cross-sections of the CMOS image sensors soldered with these three types of solders were tested and characterized using scanning electron microscopy (SEM) and energy dispersive spectrometry (EDS) to analyze the performance of the solder joints. The results indicated that the CMOS image sensor soldered with Au88Ge12 achieved stable and reliable connection performance.

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    TAN Hesheng, CHEN Mingxin, ZHAO Heng, WANG Lingyan, YANG Wenbo, DENG Huabing, JIN Yingkun, FENG Yunxiang, DAO Lichun, ZHANG Kunlin. Bonding of Ceramic Substrate and CMOS Chip of EBAPS Devices[J]. Infrared Technology, 2025, 47(5): 571

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    Paper Information

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    Received: Jan. 20, 2022

    Accepted: Jul. 3, 2025

    Published Online: Jul. 3, 2025

    The Author Email: ZHANG Kunlin (zkl.2004@126.com)

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