[1] [1] Guo Xiaodong, Li Ruxin, Yu Bingkun et al.. Femtosecond laser pulses induced nanostructures on ZnO in different ablation conditions［J］. Acta Optica Sinica, 2008, 28(5): 1017～1020

[2] [2] J. Sipe, J. Yong, J. Preston et al.. Laser-induced periodic surface structure. I. Theory［J］. Phys. Rev. B, 1983, 27(2): 1141～1154

[3] [3] J. Young, J. Preston, H. Van Driel et al.. Laser-induced periodic surface structure, II. Experiments on Ge, Si, Al, and brass［J］. Phys. Rev. B, 1983, 27(2): 1155～1172

[4] [4] J. Young, J. Sipe, H. Van Driel. Laser-induced periodic surface structure. III. Fluence regimes, the role of feedback, and details of the induced topography in germanium［J］. Phys. Rev. B, 1984, 30(4): 2001～2015

[5] [5] Wu Tengfei, Zhou Changhe, Zhu Linwei. Periodic microstructures on chromium film introduced by femtosecond laser［J］. Chinese J. Lasers, 2010, 37(3): 722～725

[6] [6] Li Zhihua, Fan Jingqin, Li Punian et al.. Effect of laser energy accumulation on surface periodic structures induced by femtoseond laser［J］. Chinese J. Lasers, 2010, 37(1): 68～73

[7] [7] A. Y. Vorobyev, C. Guo. Antireflection effect of femtosecond laser-induced periodic surface structures on silicon［J］. Opt. Express, 2011, 19(S5): A1031～A1036

[8] [8] T. H. Her, R. J. Finlay, C. Wu et al.. Femtosecond laser-induced formation of spikes on silicon［J］. Appl. Phys. A, 2000, 70(4): 383～385

[9] [9] C. Wu, C. H. Crouch, L. Zhao et al.. Visible luminescence from silicon surfaces microstructured in air［J］. Appl. Phys. Lett., 2002, 81(11): 1999～2002

[10] [10] J. E. Carey, C. H. Crouch, M. Shen et al.. Visible and near-infrared responsivity of femtosecond-laser microstructured silicon photodiodes［J］. Opt. Lett., 2005, 30(14): 1773～1775

[11] [11] B. Tull, J. E. Carey, M. A. Sheehy et al.. Formation of silicon nanoparticles and web-like aggregates by femtosecond laser ablation in a background gas［J］. Appl. Phys. A, 2006, 83(3): 341～346

[12] [12] A. S. Mahmood, M. Sivakumar, K. Venkatakrishnan et al.. Enhancement in optical absorption of silicon fibrous nanostructure produced using femtosecond laser ablation［J］. Appl. Phys. Lett., 2009, 95(3): 034107

[13] [13] J. Bonse, J. Krüger. Pulse number dependence of laser-induced periodic surface structures for femtosecond laser irradiation of silicon［J］. J. Appl. Phys., 2010, 108(3): 034903

[14] [14] J. Bonse, M. Munz, H. Sturm. Structure formation on the surface of indium phosphide irradiated by femtosecond laser pulses［J］. J. Appl. Phys., 2005, 97(1): 013538

[15] [15] M. Huang, F. Zhao, Y. Cheng et al.. Origin of laser-induced near-subwavelength ripples: interference between surface plasmons and incident laser［J］. ACS Nano, 2009, 3(12): 4062～4070

[16] [16] J. Bonse, A. Rosenfeld, J. Kruger. Implications of transient changes of optical and surface properties of solids during femtosecond laser pulse irradiation to the formation of laser-induced periodic surface structures［J］. Appl. Surf. Sci., 2010, 257(12): 5420～5423

[17] [17] M. Huang, F. Zhao, Y. Cheng et al.. The morphological and optical characteristics of femtosecond laser-induced large-area micro/nanostructures on GaAs, Si, and brass［J］. Opt. Express, 2010, 18(S4): A600～A619

[18] [18] M. Shen, C. Crouch, J. Carey et al.. Femtosecond laser-induced formation of submicrometer spikes on silicon in water［J］. Appl. Phys. Lett., 2004, 85(23): 5694～5696

[19] [19] M. Shen, James E. Carey, Catherine H. Crouch et al.. High-density regular arrays of nanometer-scale rods formed on silicon surfaces via femtosecond laser irradiation in water［J］. Nano Lett., 2008, 8(7): 2087～2091

[20] [20] Yuan Chunhua, Li Xiaohong, Tang Duochang et al.. Silicon surface microstructures induced by femtosecond laser pulses in different background gases［J］. High Power Laser and Particle Beams, 2010, 22(11): 2749～2753

[21] [21] Li Ping, Wang Yu, Feng Guojin et al.. Study of silicon micro-structuring using ultra-short laser pulses［J］. Chinese J. Lasers, 2006, 33(12): 1688～1691

[22] [22] Wang Weiping, Lü Baida, Luo Shirong. Influence of laser spatial profile on laser heating material［J］. High Power Laser and Particle Beams, 2001, 13(3): 313～316

[23] [23] G. Jellison, Jr., F. Modine. Optical functions of silicon between 1.7 and 4.7 eV at elevated temperatures［J］. Phys. Rev. B, 1983, 27(12): 7466～7472

[24] [24] J. Bonse, S. Baudach, J. Krüger et al.. Femtosecond laser ablation of silicon: modification thresholds and morphology［J］. Appl. Phys. A, 2002, 74(1): 19～25