Chinese Journal of Lasers, Volume. 39, Issue 8, 803003(2012)
Difference in Microstructures Induced by Femtosecond Laser Scanning on Silicon Surface at Different Temperatures
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Liu Kui, Feng Guoying, Deng Guoliang, Li Wei. Difference in Microstructures Induced by Femtosecond Laser Scanning on Silicon Surface at Different Temperatures[J]. Chinese Journal of Lasers, 2012, 39(8): 803003
Paper Information
Category: laser manufacturing
Received: Mar. 21, 2012
Accepted: --
Published Online: Jul. 9, 2012
The Author Email: Kui Liu (liukui1008@163.com)
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