Chinese Optics Letters, Volume. 20, Issue 6, 061302(2022)
On-chip short-wave infrared multispectral detector based on integrated Fabry–Perot microcavities array On the Cover
[1] X. Tan, H. Zhang, J. Li, H. Wan, Q. Guo, H. Zhu, H. Liu, F. Yi. Non-dispersive infrared multi-gas sensing via nanoantenna integrated narrowband detectors. Nat. Commun., 11, 5245(2020).
[2] J. Mayrwoeger, W. Reichl, C. Krutzler, B. Jakoby. Measuring CO2 concentration with a Fabry-Perot based bolometer using a glass plate as simple infrared filter. Sens. Actuator B Chem., 170, 143(2012).
[3] C. D. Tran. Infrared multispectral imaging: principles and instrumentation. Appl. Spectrosc. Rev., 38, 133(2003).
[4] M. Mrejen, Y. Erlich, A. Levanon, H. Suchowski. Multicolor time-resolved upconversion imaging by adiabatic sum frequency conversion. Laser Photon. Rev., 14, 2000040(2020).
[5] Z. Zhou, T. Zhou, S. Zhang, Z. Shi, Y. Chen, W. Wan, X. Li, X. Chen, S. N. Gilbert Corder, Z. Fu, L. Chen, Y. Mao, J. Cao, F. G. Omenetto, M. Liu, H. Li, T. H. Tao. Multicolor T-ray imaging using multispectral metamaterials. Adv. Sci., 5, 1700982(2018).
[6] F. M. Paul, B. Paul Stuart, D. B. Jeffrey, G. F. Dale, S. H. Andrew, A. W. Edward. Comparison of flash lidar detector options. Opt. Eng., 56, 031223(2017).
[7] H. Aasen, E. Honkavaara, A. Lucieer, P. J. Zarco-Tejada. Quantitative remote sensing at ultra-high resolution with UAV spectroscopy: a review of sensor technology, measurement procedures, and data correction workflows. Remote Sens., 10, 1091(2018).
[8] R. Mannila, C. Holmlund, H. Ojanen, A. Näsilä, H. Saari. Short-wave infrared (SWIR) spectral imager based on Fabry-Perot interferometer for remote sensing. Proc. SPIE, 9241, 92411M(2014).
[9] F. D. van der Meer, H. M. A. van der Werff, F. J. A. van Ruitenbeek, C. A. Hecker, W. H. Bakker, M. F. Noomen, M. van der Meijde, E. J. M. Carranza, J. B. de Smeth, T. Woldai. Multi- and hyperspectral geologic remote sensing: a review. Int. J. Appl. Earth Obs. Geoinf., 14, 112(2012).
[10] L. Guolan, F. Baowei. Medical hyperspectral imaging: a review. J. Biomed. Opt., 19, 010901(2014).
[11] J. Liu, J. Chen, J. Liu, S. Feng, X. Li, J. Cui. Optical design of a prism-gating-based lenslet array integral field spectrometer. Opt. Express, 26, 19456(2018).
[12] Z. Xuan, Y. Zhi, S. Wang, Y. Zhang, Y. Zheng, J. Li, F. Liu, Y. Xie, Y. Chen, W. Shi, F. Yi, W. Lu. Rapid and precise wavelength determination approach based on visually patterned integrated narrow bandpass filters. IEEE Photonics J., 11, 4900307(2019).
[13] A. Jdidi, N. Sfina, S. Abdi-Ben Nassrallah, M. Said, J. L. Lazzari. A multi-color quantum well photodetector for mid- and long-wavelength infrared detection. Semicond. Sci. Technol., 26, 125019(2011).
[14] S. Ogawa, M. Kimata. Wavelength- or polarization-selective thermal infrared detectors for multi-color or polarimetric imaging using plasmonics and metamaterials. Materials, 10, 493(2017).
[15] K. Yang, J. Wang, Z. Zhao, Y. Sun, M. Liu, Z. Zhou, X. Zhang, F. Zhang. Highly sensitive photomultiplication type polymer photodetectors by manipulating interfacial trapped electron density. Chem. Eng. J., 435, 134973(2022).
[16] Z. Zhao, M. Liu, K. Yang, C. Xu, Y. Guan, X. Ma, J. Wang, F. Zhang. Highly sensitive narrowband photomultiplication-type organic photodetectors prepared by transfer-printed technology. Adv. Funct. Mater., 31, 2106009(2021).
[17] M. Liu, J. Wang, K. Yang, Z. Zhao, Z. Zhou, Y. Ma, L. Shen, X. Ma, F. Zhang. Highly sensitive, broad-band organic photomultiplication-type photodetectors covering UV-Vis-NIR. J. Mater. Chem. C, 9, 6357(2021).
[18] J. W. Stewart, J. H. Vella, W. Li, S. H. Fan, M. H. Mikkelsen. Ultrafast pyroelectric photodetection with on-chip spectral filters. Nat. Mater., 19, 158(2020).
[19] B. Feng, J. Y. Zhu, B. R. Lu, F. F. Liu, L. Zhou, Y. F. Chen. Achieving infrared detection by all-Si plasmonic hot-electron detectors with high detectivity. ACS Nano, 13, 8433(2019).
[20] A. Cordaro, H. Kwon, D. Sounas, A. F. Koenderink, A. Alu, A. Polman. High-index dielectric metasurfaces performing mathematical operations. Nano Lett., 19, 8418(2019).
[21] Z. Xuan, J. Li, Q. Liu, F. Yi, S. Wang, W. Lu. Artificial structural colors and applications. The Innovation, 2, 100081(2021).
[22] X. He, Y. Liu, K. Ganesan, A. Ahnood, P. Beckett, F. Eftekhari, D. Smith, M. H. Uddin, E. Skafidas, A. Nirmalathas, R. R. Unnithan. A single sensor based multispectral imaging camera using a narrow spectral band color mosaic integrated on the monochrome CMOS image sensor. APL Photonics, 5, 046104(2020).
[23] C. Williams, G. S. D. Gordon, T. D. Wilkinson, S. E. Bohndiek. Grayscale-to-color: scalable fabrication of custom multispectral filter arrays. ACS Photonics, 6, 3132(2019).
[24] Y. Liang, S. Zhang, X. Cao, Y. Lu, T. Xu. Free-standing plasmonic metal-dielectric-metal bandpass filter with high transmission efficiency. Sci. Rep., 7, 4357(2017).
[25] S. W. Wang, D. Q. Liu, B. Lin, X. S. Chen, Z. F. Li, Y. Shi, W. Wang, W. Lu. Realization of integrated narrow bandpass filters in the infrared region. Int. J. Infrared Millim. Waves, 25, 1677(2004).
[26] D. Pohl, M. R. Escale, M. Madi, F. Kaufmann, P. Brotzer, A. Sergeyev, B. Guldimann, P. Giaccari, E. Alberti, U. Meier, R. Grange. An integrated broadband spectrometer on thin-film lithium niobate. Nat. Photonics, 14, 24(2020).
[27] J. Meng, J. J. Cadusch, K. B. Crozier. Detector-only spectrometer based on structurally colored silicon nanowires and a reconstruction algorithm. Nano Lett., 20, 320(2020).
[28] S. N. Zheng, J. Zou, H. Cai, J. F. Song, L. K. Chin, P. Y. Liu, Z. P. Lin, D. L. Kwong, A. Q. Liu. Microring resonator-assisted Fourier transform spectrometer with enhanced resolution and large bandwidth in single chip solution. Nat. Commun., 10, 2349(2019).
[29] Z. Wang, S. Yi, A. Chen, M. Zhou, T. S. Luk, A. James, J. Nogan, W. Ross, G. Joe, A. Shahsafi, K. X. Wang, M. A. Kats, Z. F. Yu. Single-shot on-chip spectral sensors based on photonic crystal slabs. Nat. Commun., 10, 6(2019).
[30] S.-W. Wang, C. Xia, X. Chen, W. Lu, M. Li, H. Wang, W. Zheng, T. Zhang. Concept of a high-resolution miniature spectrometer using an integrated filter array. Opt. Lett., 32, 632(2007).
[31] Z. Yang, T. Albrow-Owen, W. Cai, T. Hasan. Miniaturization of optical spectrometers. Science, 371, 480(2021).
[32] H. J. Tang, X. Li, Y. J. Wang, W. B. Duan, X. M. Shao, H. M. Gong. The novel dual-waveband SWIR InGaAs FPAs with monolithic integration filter microstructure. Proc. SPIE, 8982, 898229(2014).
[33] S. W. Wang, X. S. Chen, W. Lu, L. Wang, Y. G. Wu, Z. S. Wang. Integrated optical filter arrays fabricated by using the combinatorial etching technique. Opt. Lett., 31, 332(2006).
[34] S. W. Wang, M. Li, C. S. Xia, H. Q. Wang, X. S. Chen, W. Lu. 128 channels of integrated filter array rapidly fabricated by using the combinatorial deposition technique. Appl. Phys. B-Lasers Opt., 88, 281(2007).
Get Citation
Copy Citation Text
Zhiyi Xuan, Qingquan Liu, Zhuangzhuang Cui, Songlei Huang, Bo Yang, Chenlu Li, Shaowei Wang, Wei Lu, "On-chip short-wave infrared multispectral detector based on integrated Fabry–Perot microcavities array," Chin. Opt. Lett. 20, 061302 (2022)
Category: Integrated Optics
Received: Jan. 22, 2022
Accepted: Mar. 22, 2022
Published Online: Apr. 29, 2022
The Author Email: Shaowei Wang (wangshw@mail.sitp.ac.cn), Wei Lu (luwei@mail.sitp.ac.cn)