Chinese Journal of Lasers, Volume. 40, Issue 7, 707003(2013)
Mechanical Properties of HfO2/SiO2 Thin Films on Different Substrates
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Wang He, He Hongbo, Zhang Weili. Mechanical Properties of HfO2/SiO2 Thin Films on Different Substrates[J]. Chinese Journal of Lasers, 2013, 40(7): 707003
Category: materials and thin films
Received: Jan. 11, 2013
Accepted: --
Published Online: Jun. 9, 2013
The Author Email: He Wang (wanghe@siom.ac.cn)